Great thread.

For me the great minimal techno comes from people like Surgeon,Regis,Ho,Ruskin,Vogal,ect, not realy the new fresh sound of minimal music or what alot of people now would reconise as minimal.
But never the less this has been the stuff that has inspired me in minimal techno music the most.And theres a few people whos stuff im just starting to get exposure too for instance Luka Baumann and Grovskopa.
All these guys have a great understanding of mood,energy and subtleness in the sounds used,track structure and overall mood and vibe of the music.

Theres also a lot of good hard and minimal techno about.As Justin pionted out theres alot of great hard and minimal industrial techno and it doesnt have to be 140bpm or above to be hard.

Also I have to mention Rob Hood,Mills,Basic channel, Carl Craig,UR.
Not realy the kind of sound I am trying to describe above but a huge huge influence and insperation to me and Techno in genaral.